I went with Advantech subfloor (it's more waterproof than marine ply, and stiffer as well), but you still want a membrane over it to block water. I used Laticrete Strata-heat mat (basically Ditra heat mat) with double flocked tape at the seams and up the walls and pre-formed corners.
These Ditra type isolation membranes come in three thicknesses. Standard is thinnest, the electric cable heat types are all 1/4", and an XL type made for natural stone is slightly thicker. Laticrete's product is milky translucent, which lets you see the thinset coverage through it, making the install a little safer than the opaque orange.
I just found this picture I took before we filled in the mat level with the tops with thermal thinset. By my left foot, you can see one ribbon of tape at the threshold protruding from under the mat seam. The rough-ins on the bottom left are for the wall hung toilet, and the heat cable does not run under the vanity. The floor drain went over this (a Kerdi linear drain was used), and the tub is now in the alcove up top.

If you look REALLY closely, you can see some orange from the Kerdi pre-formed corners at the top corners of the mat. The floor slopes towards the linear drain (like a shower pan, but this is NOT a shower), so I didn't bother with the high corners at the bottom. The blue tape was a cheap Kerdi knockoff (I wasn't concerned with manufacturer warranties).