I have a DeWalt DC233 36V rotary hammer for which I recently picked up a D25302DH HEPA dust extractor that fits on board. It's a nice setup which works quite well. It's available as a complete kit these days (DC233KLDH), but not cheap. Milwaukee just came up with an M12 powered add-on for any rotary hammer they call the 2306-22 M12 Hammervac. This also fits completely onboard an existing corded or cordless rotary hammer. Like anything safety and HEPA, it's not cheap either. There are also fittings to install the extractor head into various hammers and these connect to a separate vacuum, but now you have a hose and separate vac to contend with.
I recommend the DeWalt setup, if you can handle the price. If you already have a cordless rotary hammer, get the Milwaukee.